Magnetic write head characterization with nano-meter resolution using nitrogen vacancy color centers

ABSTRACT

A crystal film with one or more nitrogen vacancy centers is placed in a magnetic field produced by a recording head and excitation illumination and a varying excitation field is applied. A confocal microscope or wide-field microscope optically detects a decrease in a spin dependent photoluminescence in response to the excitation illumination caused by electron spin resonance (ESR) of the at least one nitrogen vacancy center at varying excitation frequencies of the excitation field to measure Optically Detected Spin Resonance (ODMR). A characteristic of the recording head is determined using the ODMR.

BACKGROUND

As critical dimensions in magnetic data storage systems, e.g. hard diskdrives, are continuing to shrink to a few tens of nanometers, thedevelopment of characterization techniques that may be used inmanufacturing or research and development has become increasinglydemanding. For example, optical and magneto-optical metrology methods donot provide the spatial resolution required to determine properties ofthe write-field emanating from the write pole on the nanometer lengthscale. Magnetic Force Microscopy, on the other hand, has high spatialresolution but does not provide quantitative information about themagnetic field strength. In addition, current magnetic recording headsinclude other features that are on the nanometer length scale that aredesirable to characterize, but that cannot be adequately measured usingconventional metrology systems. By way of example, some magneticrecording heads include features such as optical nano-apertures for heatassisted magnetic recording (HAMR), for which characterization of theoptical power in the near-field of these nano-apertures is desired.Accordingly, improved metrology methods for characterizing, e.g.,magnetic recording heads is desired.

SUMMARY

A crystal film with one or more nitrogen vacancy centers is placed in amagnetic field produced by a recording head and excitation illuminationand a radio frequency field with variable frequency is applied. Amicroscope, such as a confocal microscope or a wide-field microscope,optically detects a decrease in spin dependent photoluminescence inresponse to the excitation illumination caused by electron spinresonance (ESR) of the at least one nitrogen vacancy center at varyingexcitation frequencies of the excitation field to measure OpticallyDetected Spin Resonance (ODMR). A characteristic of the recording headis determined using the ODMR.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates an optical metrology device capable of characterizingmagnetic recording heads using photoluminescence produced by asubstitutional impurity in a crystal.

FIG. 2 schematically illustrates the energy levels of a negativelycharged nitrogen vacancy center in a diamond crystal.

FIG. 3 schematically illustrates a diamond film with a plurality ofnitrogen vacancy centers that is positioned to be in a magnetic fieldproduced by a write pole from a recording head.

FIG. 4 illustrates an optical metrology device that uses StimulatedEmission Depletion.

FIG. 5 illustrates the point spread function of excitation illuminationand depletion illumination.

FIG. 6 illustrates the effective point spread function of the combinedexcitation illumination and depletion illumination from FIG. 5.

FIG. 7 illustrates several waveforms used to measure Optically DetectedSpin Resonance using depletion illumination.

FIG. 8 schematically illustrates the use of depletion illumination tomeasure Optically Detected Spin Resonance from a diamond film with aplurality of nitrogen vacancy centers that is positioned to be in amagnetic field produced by a write pole from a recording head.

FIG. 9 schematically illustrates the use of depletion illumination tomeasure Optically Detected Spin Resonance from a diamond film with aplurality of nitrogen vacancy centers that is in contact with the airbearing surface of the recording head.

FIG. 10 schematically illustrates a diamond film with a nitrogen vacancycenter that is on an Atomic Force Microscope arm positioned to be in amagnetic field produced by a write pole from a recording head.

FIG. 11 schematically illustrates a diamond film with a matrix of evenlyspaced nitrogen vacancy centers that is positioned to be in a magneticfield produced by a write pole from a recording head and that isilluminated with wide-field illumination.

FIG. 12 illustrates a matrix of evenly spaced nitrogen vacancy centersin a diamond film having a density such that the distance betweenadjacent nitrogen vacancy centers is less than the width of a writepole.

FIG. 13 illustrates an exemplary homogenous write field distribution ofa write pole having radial symmetry and a maximum plateau.

FIGS. 14A, 14B, and 14C illustrate nitrogen vacancy centers with thesame resonance conditions when measuring ODMR in a homogenous writefield distribution.

FIG. 15 illustrates an ESR spectrum with the amplitude of the integratedphotoluminescence emitted from the matrix of nitrogen vacancy centersfor a homogenous write field distribution with respect to variousexcitation frequencies.

FIG. 16 illustrates an exemplary in-homogenous write field distributionof a write pole having radial symmetry.

FIG. 17 illustrates an ESR spectrum with the amplitude of the integratedphotoluminescence emitted from the matrix of nitrogen vacancy centersfor an in-homogenous write field distribution with respect to variousexcitation frequencies.

FIG. 18 illustrates a magnified view of a resonance peak from FIG. 17.

FIGS. 19A, 19B, and 19C illustrate nitrogen vacancy centers with thesame resonance conditions when measuring ODMR in an in-homogenous writefield distribution.

FIG. 20 illustrates a plan view of a portion of a recording head withwrite pole with a wrap-around shield.

FIGS. 21A and 21B illustrate a write field profile of a recording headof FIG. 20 in the down track and cross track directions.

FIG. 22 illustrates a matrix of evenly spaced nitrogen vacancy centersin a diamond film overlying the write field from FIGS. 21A and 21Billustrated as semi-circles.

FIGS. 23A, 23B, and 23C illustrate nitrogen vacancy centers with thesame resonance conditions when measuring ODMR in the write fielddistribution of FIGS. 21A and 21B.

FIG. 24 illustrates an ESR spectrum with the amplitude of the integratedphotoluminescence emitted from the matrix of nitrogen vacancy centersfor the write field distribution of FIGS. 21A and 21B with respect tovarious excitation frequencies.

FIG. 25 schematically illustrates a diamond film with a plurality ofnitrogen vacancy centers that is positioned to measure a write fieldfootprint from a recording head.

FIG. 26 illustrates a three-dimensional model of a write fielddistribution from a write head and illustrates the effective magneticwrite-width.

FIG. 27 illustrates the write field contours of the write fielddistribution from FIG. 26.

FIG. 28 illustrates a measured ODMR spectrum, e.g., the ODMR signalbetween the minimum write field (Bmin) to the maximum write field(Bmax), produced by write fields in the area enclosed by the blackcontour line in FIG. 27.

FIG. 29 is a graph illustrating linear dependence of the integratedspectral intensity S_(int) on the magnetic write width.

FIGS. 30A and 30B illustrate the temperature dependence of the ESRfrequency and resulting resonance lines at different temperatures, e.g.,300° K and 700° K.

FIG. 31 schematically illustrates a diamond film with a plurality ofnitrogen vacancy centers that is positioned to measure a near fieldaperture 180 of a Heat Assisted Magnetic Recording write head.

FIG. 32 illustrates the temperature profile produced by a near fieldaperture used in a Heat Assisted Magnetic Recording write head.

FIG. 33 is an ESR spectrum that may be generated while measuring a nearfield aperture and that may be evaluated to extract temperatureinformation.

FIG. 34 illustrates a temperature profile extracted from an ESRspectrum.

DETAILED DESCRIPTION

FIG. 1 illustrates an optical metrology device 100 capable ofcharacterizing magnetic recording heads using photoluminescence producedby a substitutional impurity 112 in a crystal 110. For example, one ormore nitrogen vacancy centers (NV centers) in a diamond crystal may beused. An NV center is a naturally occurring or technically createdimpurity in a diamond crystal where a Nitrogen atom replaces a Carbonatom creating a vacancy next to the Nitrogen atom. The diamond crystal,by way of example, may have a (111) crystal orientation, but othercrystalline orientations are possible. If desired, other substitutionalimpurities in crystals may be used, such as the Silicon-vacancy centerin diamond (SiV-), but for the sake of simplicity, the presentdisclosure will refer to nitrogen NV centers in diamond. The crystal maybe, e.g., a crystal film that contains a plurality of NV centers or acrystal particle that contains a single (or a few) NV centers. Ifdesired, a film may be produced that contains a plurality of crystalparticles in a suspension forming a film on, e.g. a glass substrate,each crystal particle having one or more NV centers.

The NV centers, which are basically artificial atoms with distinctquantum energy levels, show unique extrinsic and intrinsic optical spindynamics including stable photoluminescence (PL) based on radiatingtransitions between optically excited energy levels of their chargedquantum states. The PL is temperature as well as magnetic fielddependent. Further, Electron Spin Resonance (ESR) is excited in the NVcenter electronic spin system by an external radio frequency (RF)-fieldwith frequencies resonant with the transitions between the energysub-levels. At resonance, the PL intensity is measurably reduced.Moreover, the ESR is linearly dependent on an applied magnetic fieldand, thus, one or more NV centers may be used as a magnetic field sensorwith nanometer resolution using optically detected ESR (sometimesreferred to herein as ODMR (Optically Detected Magnetic Resonance) (ESRis paramagnetic resonance that falls into this category)). The ESR isalso temperature dependent, so that for a fixed applied magnetic field,the shift in ESR is a measure of temperature. For both magnetic fieldand temperature measurements, the spatial resolution is determinedfundamentally by the size of a single NV center which is on the Angstromlength scale. Accordingly, the optical metrology device 100 mayoptically detect the PL of one or more NV centers 112 in a crystal 110,e.g. using photon counting by employing a photo detector or by using acamera with high sensitivity, to measure a variety of characteristics ofa recording head that has features with a nanometer length scale.

The optical metrology device 100 may be, e.g., a microscope such as aconfocal microscope or a wide-field microscope. For example, a confocalmicroscope may include a light source 102 that produces excitationillumination 103 that is incident on the crystal 110 with thesubstitutional impurities 112. The use of a confocal detection systemenables selection of PL coming from only a small volume of the crystal110, e.g., 1 μm³, that is associated with the spot on the surface of thecrystal 110 produced by the excitation illumination change. The lightsource 102 may be, e.g., a laser, LED, etc., that excites the NV centerwith a continuous (CW) or pulsed excitation illumination, with one ormore wavelengths in a range of 460 nm to 580 nm, and which may be, e.g.,532 nm. With pulsed excitation illumination, the pulse width may be,e.g., approximately 800 ps with a 4-MHz repetition rate. The lightsource 102 may have a power density of, e.g., 40 kW/cm², to polarize theNV center by pumping it between the ground and the excited levels. Thelight from the light source 102 may be provided to a collimatorconsisting of lenses 104 and 106 either directly or by way of anintervening optical element, e.g., fiber optics or a light pipe. Thecollimator 104, 106 expands and collimates the light, which is focusedby lens 122, which is also used to collect the PL emanating from the NVcenters. In an embodiment in which the device is a confocal microscope,the lens 106 (and/or other appropriate lens(es)) may be moved back andforth, as illustrated by arrow 108 and/or a 2-dimensionalsteering-mirror system could be used to move the excitation illumination103 relative to the back-aperture plane of the objective lens 122scanning the focused beam 103 in the sample plane. Additionally,appropriate apertures may be used in an embodiment in which themicroscope is a confocal microscope. Moreover, if desired, additionallight sources may be used along with light source 102.

A beam splitter 120 receives the excitation illumination from the lightsource 102 and provides at least a portion of the excitationillumination to the objective lens 122. The excitation illumination isfocused on the surface of the crystal 110 by the objective lens 122,which may have a high numerical aperture (NA=0.95) or an oil-immersionlens with an NA of, e.g. 1.3. The objective lens 122 may focus theexcitation illumination on the crystal 110 at a normal angle ofincidence. It should be understood, however, that an oblique angle ofincidence of the excitation illumination may be used if desired. Theobjective lens 122 focuses the light onto the crystal 110 with one ormore NV centers 112. The crystal 110 and NV centers 112 are positionedto be in a magnetic field produced by the recording head 114. Therecording head 114 may be a magnetic recording head, such as that usedin hard disk drives, and may be in any desired form factor includingbar, slider, HGA (head gimbal assembly), and HSA (head stack assembly).Moreover, the recording head 114 may be a Heat Assisted MagneticRecording (HAMR) write head or other type of magnetic recording head.The crystal 110 may be placed near or in contact with the recording head114, or if desired, deposited on the recording head 114. Moreover, ifdesired, an intervening layer may be located between the crystal 110 andthe recording head 114, such as a layer of a magnetic recording mediumor a layer of material with low thermal conductivity that may be heatedby a thermal device on a HAMR write head, or a reflecting layer. The NVcenters 112 in the crystal 110 may have a relatively low density suchthat the distance between adjacent NV centers 112 is greater than awidth of the write pole 116 to be measured in the recording head 114.Alternatively, a single NV center 112 may be used in the crystal 110. Insuch an embodiment, relative movement between the recording head 114 andthe crystal 110 may be produced, e.g., as illustrated by actuator 118.Alternatively, the NV centers 112 in the crystal 110 may have arelatively high density such that the distance between adjacent NVcenters 112 is similar to or less than the width of the write pole 116to be measured in the recording head 114. With a relatively high NVcenter density, relative movement between the crystal 110 and therecording head 114 may not be necessary. Moreover, in some embodiments,movement between the crystal 110 and the recording head 114 may not bepossible, for example, if the crystal 110 is applied directly to therecording head 114, e.g., during the manufacturing process. The opticalmetrology device 100, however, may include additional optic elements tomove the excitation illumination over the crystal 110, e.g., in one ortwo dimensions. In another embodiment, no relative motion is employed,e.g., between the excitation illumination and the crystal or between thecrystal and the write pole, but rather the integral ODMR signal iscollected for varying excitation fields over an area that includes thewrite pole, and the magnetic field is derived from the ODMR spectrumusing a high density NV film.

During measurement, PL 113 produced by the NV centers 112, illustratedby the dotted line, will be collected by the objective lens 122 anddirected by the beam splitter 120 towards a detector 130. Asillustrated, a spectral filter 124, such as a dichroic film, ispositioned before the detector 130 to remove any reflected excitationillumination and to direct only the PL to the detector 130. The spectralfilter 124, thus, may be a long-pass filter with a wavelength cut-offat, e.g., 580 nm, to filter out any remaining pump light. The detector130 may be, e.g., a non-imaging photodetector, such as a siliconavalanche photodiode operating in the signal photon regime, whichdetects the optical intensity at a single spot. Alternatively a CCDcamera can be used to detect the PL.

In addition, a radio wave frequency (RF) antenna 126 is positioned toprovide a variable excitation field to the crystal 110. The excitationfield produced by RF antenna 126 drives electron spin resonance whichmay be optically detected, e.g., ODMR, by detecting a drop in the spindependent PL in response to the excitation illumination caused byelectron spin resonance (ESR) of the nitrogen vacancy centers at varyingexcitation frequencies of the excitation field. The excitation field maybe controlled to sweep the frequency in a continuous or stepped manner.Moreover, a continuous or pulsed excitation field may be produced by theRF antenna 126 with, e.g., a power of 1 W and a frequency ranging from 1GHz to 5 GHz.

The detector 130 is connected to a computer 140 and the computer 140receives, stores, and analyzes the optically detected data provided bythe detector 130, along with the excitation frequencies provided by RFantenna 126 associated with the data. The computer 140 includes aprocessor 142 with memory 144, as well as a user interface includinge.g., a display 146 and input devices 148. A non-transitorycomputer-usable storage medium 150 having computer-readable program codeembodied may be used by the computer 140 for causing the processor 142to control the optical metrology device 100 and to perform the functionsincluding the analysis described herein. The data structures andsoftware code for automatically implementing one or more acts describedin this detailed description can be implemented by one of ordinary skillin the art in light of the present disclosure and stored, e.g., on acomputer readable storage medium 150, which may be any device or mediumthat can store code and/or data for use by a computer system such asprocessor 142. The computer-usable storage medium 150 may be, but is notlimited to, magnetic and optical storage devices such as disk drives,magnetic tape, compact discs, and DVDs (digital versatile discs ordigital video discs). A communication port 152 may also be used toreceive instructions that are used to program the computer 140 toperform any one or more of the functions described herein and mayrepresent any type of communication connection, such as to the internetor any other computer network. Additionally, the functions describedherein may be stored in memory 155 or embodied in whole or in partwithin the circuitry of an application specific integrated circuit(ASIC) or a programmable logic device (PLD), and the functions may beembodied in a computer understandable descriptor language which may beused to create an ASIC or PLD that operates as herein described.

As illustrated, the computer 140 may be coupled to the recording head114, via a probe card 132 which is connected to the recording head 114using one or more probes 134, which may be, e.g., pogopins, probes, orother contacts such as wires that are wire bonded. The probe card 132may be coupled to a biasing source 131 that provides a bias signal, suchas a current or voltage signal, which is provided to the recording head114 via the probe card 132 and causes the recording head 114 to producea magnetic field. The biasing source 131 may be connected to andcontrolled by the computer 140. The computer 140, thus, may control themagnetic field produced by the recording head 114, e.g., by controllingthe bias signal provided to the recording head. The biasing source 131may provide a plurality of bias signals with different levels to therecording head 114. The computer 140 may cause the biasing source 131 tofurther control any other desired features of the recording head 114,such a thermal device, e.g., a high intensity light source, on therecording head 114, when the recording head 114 is a HAMR write head.Additionally, when the recording head 114 includes a Dynamic-FlyingHeight (DFH) device, one of the probes 134 of the probe card 132 may beused to provide current to the microactuator device from a secondcircuit in the current or voltage source that is connected to thecomputer 140. Write heads use a DFH device as an adjustment mechanism tointernally bias the write pole closer to or further from the air bearingsurface. The DFH device is typically in the form of a heaterincorporated into the write head structure, with additional contact padsfor external connection. By applying a bias to the additional contactpads via the probe card 132, the position of the write pole can beadjusted towards or away from the air bearing surface of the write head.By adjusting the position of the write pole via the DFH device, therecording head 114 may be measured at different temperatures and/orvertical displacement from the crystal 110.

Additionally, when the recording head 114 includes a microactuatordevice, one of the probes 134 of the probe card 132 may be used toprovide current to the microactuator device. The source of the currentmay be a second circuit in the current or voltage source connected tothe computer 140. Write heads use a microactuator device as anadjustment mechanism to move the write pole in the cross-track directionto better align the write pole to the lands of a disk that is beingwritten to. The microactuator device is incorporated into the write headstructure, which includes additional contact pads for externalconnection. By applying a bias to the additional contact pads via theprobe card 132, the position of the write pole can be adjusted in thecross-track direction. By adjusting the position of the write pole viathe microactuator device during measurement with the device, theperformance of the microactuator may be verified and the characteristicsof the recording head 114 may be measured at different write polepositions.

The computer 140 is further coupled to control the RF antenna 126 toprovide a desired excitation field (or varying pulsed excitation field)to the crystal 110 during measurement.

As discussed above, an NV center in diamond is a naturally occurring ortechnically created impurity in a diamond crystal where a Nitrogen atomreplaces a Carbon atom creating a vacancy next to the Nitrogen atom.Nitrogen vacancy centers may be created in a diamond crystal, e.g.,using a type-Ib HPHT single-crystal sample that is initially embeddedwith nitrogen impurities. For example, nitrogen impurities may beembedded by irradiation with a an ion-beam, e.g. N₂ ⁺ ions at 5 keV, incase of a very high purity diamond film or by an electron beam in casethe diamond film already has nitrogen impurities and annealing, e.g.,for 2 hours at 850° C. The density of the NV centers within the crystalfilm may be controlled, e.g., by controlling the applied irradiationdose, or using appropriate masking techniques. For example, an ion beamfluence of 10¹¹ cm² can result in density of 8×10¹⁰ NV cm⁻². Moreover,by controlling the energy of the implantation as well as the annealingprocess the depth of the NV centers implanted in the crystal may becontrolled.

FIG. 2 schematically illustrates the energy levels of a negativelycharged NV center in a diamond crystal. An NV center may be opticallyexcited, e.g., with excitation illumination having a wavelength rangefrom 460 nm to 580 nm, which yields an intense fluorescence emissionfrom the NV center with lifetimes in the millisecond range. For example,as illustrated, the NV center may be excited with a laser at awavelength of 532 nm and in response will emit a broadband luminescencewith a zero phonon line at 637 nm, at room temperature. FIG. 2 furtherillustrates the mechanism of stimulated emission, in which an electronin an excited state gives energy to an incoming photon and is forced tothe ground state before it can create photoluminescence by spontaneousemission. The ground state of the NV center has an electron spin tripletstructure with a zero-field frequency splitting of 2.87 GHz between them_(s)=0 and the degenerate m_(s)=±1 states. In the absence of anexternal magnetic field, e.g., from the recording head 114, a drop ofluminescence intensity is present at an excitation frequency of 2.88 GHzdue to the induced change in populations of m_(s)=0 and m_(s)=±1 spinsublevels. Thus, the location of the NV center may be identified by anoptically detected zero field magnetic resonance at ˜2.88 GHz which hasits origin in the crystal-field splitting of energy sub-levels. Themagnetic resonance occurs between the m_(s)=0 and m_(s)=±1 spinsub-levels of the spin triplet ground state ³A₂ and can be detected byeither conventional electron paramagnetic resonance (EPR) or opticallydetected magnetic resonance (ODMR). The optical detection of themagnetic resonances of the NV center is enabled by the differingfluorescence of the m_(s)=0 and ±1 spin projections, i.e. thefluorescence intensity is reduced when the spin system is in resonancedue to the RF excitation.

In the presence of a magnetic field from the recording head 114, theresonance peak will split due to the Zeeman effect. As illustrated inFIG. 2, two resonance peaks may be identified, respectivelycorresponding to transitions between m_(s)=0 and m_(s)=−1, and betweenm_(s)=0 and m_(s)=+1 sublevels. The frequency of these resonance peaksis a function of the magnitude of the magnetic field and is called theLarmor frequency f given by

$\begin{matrix}{f = {\frac{1}{2\;\pi}\gamma\; B}} & {{eq}.\mspace{14mu} 1}\end{matrix}$

where γ is the Gyromagnetic ratio and B the magnetic field, i.e. bymeasuring f, the magnetic field B may be determined. Thus, for magneticfield sensing applications, the magnetic field may be evaluated bymeasuring the Zeeman shifts of the NV center defect electron spinsub-levels through the optical detection of electron spin resonance(ESR), i.e., ODMR. The ODMR may be measured by detecting a decrease inthe spin dependent PL caused by ESR of the NV centers at varyingexcitation frequencies of the excitation field. One of the advantages ofthe use of NV center-based magnetometry is the possible combination ofatomic-scale spatial resolution with high magnetic field sensitivity,e.g., below 10 nT Hz^(−1/2), even under ambient conditions.

As illustrated in FIG. 2, the m_(s)=0 spin state is dependent ontemperature D(T), and consequently the ESR frequency is temperaturedependent. Moreover, the PL intensity (I_(PL)) of an NV center and therelative I_(PL) difference between its spin states (ESR contrast), whichstrongly decrease above 550° K, may be used to measure temperature.Accordingly, one or more NV centers may serve as a nano-scalethermometer with sensitivities on the order of 100 mK/Hz between roomtemperature and 700° K. The high sensitivity and wide range of operatingtemperatures make NV centers an attractive candidate for a variety ofthermo-sensing applications such as diamond-based scanning thermalmicroscopy. The impact of temperature versus magnetic field on the ESRspectrum may be distinguished using a pulsed RF excitation field with anappropriate pulse sequence (spin echo technique), as opposed to acontinuous-wave RF excitation field.

In addition, the PL of an NV center may be turned “off” in time, whenthe 532 nm excitation pulse, e.g., with a duration of 60 ps, is followedby a longer wavelength pulse e.g. 775 nm and duration 3.2 ns, ofsufficient intensity. This mechanism is known as Stimulated EmissionDepletion (STED). Alternatively, STED with CW or quasi CW illuminationmay be employed. Spatial resolution may be improved using STED tofunctionally switch off a portion of NV centers, e.g., STED microscopy.For example, STED microscopy can be implemented by combining theexcitation been with depletion illumination that has a focal intensitydistribution I_(STED) featuring a central zero intensity, such as a diskshape. The depletion illumination is coincident with the excitationillumination on the crystal film. Overlapping the Airy disk (PointSpread Function) of the excitation illumination having an intensityI_(S) with the ring shaped depletion illumination and enforcingI_(STED)>>I_(S) switches off the NV centers covered by the Airy disk(diffraction limited) of the excitation illumination except for those atthe depletion illumination minimum where I_(STED)<I_(S). Thus, the Airydisk of the excitation illumination may be ignored when calculating thespot size in which NV centers may still be “on,” i.e., responsive to theexcitation illumination, and therefore, the effective point-spreadfunction (PSF) of the system is no longer diffraction limited. Althoughthe resolution Dx,y scales with the wavelength, adjusting I^(max), thedepletion illumination maximum, squeezes the STED SPSF (Stimulated PointSpread Function) continuously, and therefore wavelength is not alimiting factor. An advantageous property of the use of depletionillumination is that when scanned over the crystal film together withthe excitation illumination, the ring-shaped depletion light intensityenables a reduced number of NV centers, e.g., a single NV center, tofall within the ring minimum. The stimulated point spread functiondetermines the effective PL detection resolution, i.e., it is acharacteristic of the apparatus and determines the minimum distancebetween two NV centers where the two NV centers can still bediscriminated. All other NV centers are switched “off” by the depletionillumination or simply not excited by the excitation illumination. Thus,with the use of a depletion illumination, NV centers may be resolvedindividually, thereby further improving the spatial resolution ofmeasurements, and may obviate the need to physically produce relativemovement between the crystal with NV centers and the recording head toproduce a two dimensional scan of the recording head.

Additionally, if desired, Ground State Depletion (GSD) may be used, asopposed to STED. Similar to STED, GSD uses depletion illumination tofunctionally switch off a portion of NV centers, but unlike STED, GSDuses the same wavelength for the excitation illumination and thedepletion illumination.

Thus, one or more NV centers in a diamond film may be used to measurethe write field of a recording head with nano-meter spatial resolutionmaking use of the optically detected Electron Spin Resonance (ODMR),which frequency spectrum depends linearly on the magnetic field.Accordingly, characteristics of the recording head, including strengthof the magnetic field and physical dimensions of the write pole may bemeasured. This may be carried out by exercising the write portion of therecording head with a write current, which can be a DC or an AC current,to produce the magnetic field at the write pole. For example, thestrength of the magnetic field may be determined for any scannedposition based on the frequency of these resonance peaks, as provided byequation 1. Additionally, one or more NV centers in a diamond film maybe used to measure the near-field power of a nano aperture in arecording head used in thermally assisted magnetic recording withnano-meter spatial resolution making use of temperature dependence ofthe optically detected Electron Spin Resonance or the temperaturedependency of the PL intensity.

FIG. 3, by way of example, schematically illustrates a diamond film 110with a plurality of NV centers 112 and that is positioned to be in amagnetic field B produced by a write pole 116 from a recording head 114.As discussed above, a light source 102 (shown in FIG. 1) producesexcitation illumination 103 that is focused by objective lens 122 ontothe diamond film 110 while an external RF excitation field is producedby the RF antenna 126 with varying excitation frequencies or pulsesequence. In response to the excitation illumination 103, the NV center112 a produces spin dependent PL 113 that is collected by the objectivelens 122 and provided to the detector 130 (shown in FIG. 1). TheOptically Detected Spin Resonance (ODMR) may be measured by detecting adecrease in the spin dependent PL 113 caused by electron spin resonance(ESR) of the NV centers at varying excitation frequencies of theexcitation field.

As illustrated in FIG. 3, the write pole 116 has a width W, while thedensity of the NV centers 112 in the diamond film 110 is such thatadjacent NV centers are separated by a distance d that is greater thanthe width W of the write pole 116, i.e., d>W. In such a configuration, asingle NV center may be positioned over the write pole 116, asillustrated. Relative movement between the recording head and thediamond film 110 may be produced in two dimensions, e.g., by moving therecording head with respect to the diamond film 110, thereby scanning asingle NV center over the recording head in two dimensions, asillustrated by arrows 162. The ODMR may be measured by detecting adecrease in the spin dependent PL 113 caused by electron spin resonance(ESR) of a single NV center at varying excitation frequencies of theexcitation field as the NV center is scanned over the recording head intwo dimensions. Accordingly, characteristics of the recording head 114may be measured with nano-meter spatial resolution including dimensionsof write pole 116 and strength of the magnetic field B.

FIG. 4 illustrates an optical metrology device 100′ that is similar tothe optical metrology device 100, shown in FIG. 1, like designatedelements being the same, but that uses Stimulated Emission Depletion (orGSD) as discussed above. As illustrated, optical metrology device 100′includes a second light source 102 _(DEPL) that produces depletionillumination 103 _(DEPL), with the same or different wavelength in thecase of GSD or STED, respectively, and that is coincident on the diamondfilm 110 with the excitation illumination 103 from light source 102. Thelight source 102 produces excitation illumination 103 that has aGaussian point spread function and produces a relatively largediffraction limited spot on the diamond film 110. FIG. 5, by way ofexample, illustrates the Gaussian point spread function of theexcitation illumination 103 with a solid line. The second light source102 _(DEPL) produces light that passes through a vortex phase plate 164to produce a ring shaped beam that has a central zero intensity at thefocal plane. FIG. 5, by way of example, illustrates a ring shaped pointspread function distribution of the depletion illumination 103 _(DEPL)which is coincident with the excitation illumination 103. The depletionillumination 103 _(DEPL) quenches PL in the NV centers 112 in thediamond film 110 that are off-center, so that the off-center NV centersonly contribute a constant background, which may be subtracted from theODMR signal, thereby providing a signal from only the NV centers in thecenter of the depletion illumination 103 _(DEPL). FIG. 6 illustrates theeffective point spread function 166 of the combined excitationillumination 103 combined with the depletion illumination 103 _(DEPL).The coincident excitation illumination 103 and depletion illumination103 _(DEPL) may be scanned over the diamond film 110 to measurecharacteristics of the recording head 114 in two dimensions, e.g., usingone or more mirrors 117 in the beam path.

In the case of using GSD, the depletion illumination 103 _(DEPL) mayhave a wavelength of 532 nm, with increased power. For example, areduction in the photoluminescence may be achieved for depletionillumination 103 _(DEPL) with power greater than 2 MW/cm². The depletionillumination 103 _(DEPL) may be continuous (CW) or pulsed excitation,with a pulse width of, e.g. 150 ps, where a pulsed depletionillumination 103 _(DEPL) results in stronger photoluminescencereduction.

FIG. 7, by way of example, illustrates several waveforms that may beused to measure ODMR using depletion illumination. As illustrated, apulse of excitation illumination is provided along with the excitationfield and followed by a pulse of depletion illumination. The RFexcitation field need not be pulsed and may always be on. The intensityof the depletion illumination is much greater than the intensity of theexcitation illumination in the case of case of GSD or has a longerwavelength in case of STED. The PL signal 168 is detected after thepulsed depletion illumination.

FIG. 8 schematically illustrates the measurement of ODMR from a diamondfilm 110 with NV centers 112 similar to FIG. 3, but uses depletionillumination 103 _(DEPL), e.g., for either STED or GSD, and the diamondfilm 110 has an increased density of NV centers 112. As illustrated inFIG. 8, the density of the NV centers 112 in the diamond film 110 may besuch that adjacent NV centers are separated by a distance d that is lessthan the width W of the write pole 116, i.e., d<W. The density of NVcenters may be chosen so that a plurality of NV centers, e.g. 10×10 NVcenters, is located under the write pole 116. The coincident excitationillumination 103 and depletion illumination 103 _(DEPL) enables areduced number of NV centers to be resolved, e.g., only NV centers thatfall within the ring minimum of the depletion illumination 103 _(DEPL)are resolved. The coincident excitation illumination 103 and depletionillumination 103 _(DEPL) may be scanned in two dimensions over thediamond film, as illustrated by arrows 174, e.g., using an arrangementof mirrors in the beam path, thereby obviating the needs for an actuatorto produce relative movement between the recording head and the diamondfilm 110. The ODMR may be measured by detecting a decrease in the spindependent PL 113 caused by electron spin resonance (ESR) of the NVcenter(s) that fall within the ring minimum of the depletionillumination 103 _(DEPL) at varying excitation frequencies of theexcitation field as excitation illumination 103 and depletionillumination 103 _(DEPL) are scanned over the recording head in twodimensions. Accordingly, characteristics of the recording head may bemeasured with nano-meter spatial resolution including dimensions ofwrite pole 116 and strength of the magnetic field B.

If desired, the diamond film 110 may be in direct contact with therecording head 114, e.g. in contact with the Air Bearing Surface (ABS)of the recording head. For example, a diamond film 110 with a relativelyhigh density of NV centers 112, e.g., such that there are a plurality ofNVC centers located under the write pole, may be directly deposited onthe ABS of the recording head. FIG. 9 schematically illustrates themeasurement of ODMR from a diamond film 110 with NV centers 112, similarto that shown in FIG. 8, but with the diamond film 110 attached to theABS of the recording head 114, i.e., directly coupled to or coupled towith one or more intervening layers. As discussed above, the coincidentexcitation illumination 103 and depletion illumination 103 _(DEPL) maybe scanned with respect to the recording head in two dimensions tomeasure ODMR at varying excitation frequencies of the excitation fieldas excitation illumination 103 and depletion illumination 103 _(DEPL)are scanned over the recording head in two dimensions.

FIG. 10 is similar to FIG. 3 and schematically illustrates themeasurement of ODMR from a diamond film 110 with an NV center 112 heldon the tip of an Atomic Force Microscope (AFM) arm 176 and that is incontact with the ABS of the recording head 114. As illustrated, thediamond film 110 may be a micron sized diamond particle that includes asingle or several NV centers 112. The AFM arm 176 is scanned over therecording head 114 in two dimensions, as illustrated by arrows 178 andthe PL 113 from the NV centers is collected. As the AFM arm 176 isscanned over the recording head 114, there is no need for depletionillumination. Thus, the ODMR may be measured from the NV center(s) 112in the diamond film 110 positioned at the tip of the AFM arm 176, atvarying excitation frequencies of the excitation field as the AFM arm176 is scanned over the recording head in two dimensions.

Additionally, a characteristic of a recording head may be determined bymeasuring the ODMR from a diamond film 110 that includes a matrix ofevenly spaced NV centers having a known density. FIG. 11, by way ofexample, is similar to FIG. 3, and schematically illustrates themeasurement of ODMR from a diamond film 110 with a matrix of evenlyspaced NV centers 112 with a known density, but uses wide-fieldillumination 103 a that is incident on the diamond film 110 andresulting PL is collected by lens 122 a and an integrated PL is used.Wide field illumination, as used herein, refers to illumination usedwith microscopy having a homogeneously illuminated field of view to forman image, as compared to scanning a focused beam. The integrated PL overan area that covers the write pole (or near field aperture) is detected.The RF excitation field may be swept over a range of frequenciesadequate for the write-field range to be measured or the temperaturerange in case the near-field power is measured. The detected PL signalwill contain discrete resonance lines, similar to those illustrated inFIG. 15 (field measurement) or FIG. 33 (temperature), that can be mappedonto the known spatial distribution of the NV centers. Characteristicsof the recording head may be determined from the measured ODMR and knowndensity of the NV centers, i.e. a known distance between adjacent NVcenters. For example, assuming the magnetic field is at a maximum at thewrite gap, the spatial distribution of the write field includingmagnetic write width may be determined from the discrete resonance linesthat correspond to discrete locations in two dimensions of the NVcenters. Accordingly, no scanning of the recording head orsuper-resolution techniques, such as STED or GSD, is required becausewide-field illumination is employed as illustrated in FIG. 11.

FIG. 12, by way of example, illustrates a matrix of evenly spaced NVcenters 112 in a diamond film 110, having a density such that thedistance between adjacent NV centers 112 is less than the width of awrite pole. As illustrated in FIG. 11, the matrix of evenly spaced NVcenters 112 in the diamond film 110 is placed in a magnetic fieldproduced by the write pole 116, e.g., by bringing the diamond film 110into contact or near contact with the write pole 116. FIG. 13, by way ofexample, illustrates a homogenous write field distribution of a writepole 116 having radial symmetry and a maximum plateau. The spatialextent of different values of the write field, e.g., the field maximum202, and field values 204 and 206, are illustrated in FIG. 12 as circleshaving the same reference numbers.

The NV centers enable optically detected electron-spin resonance (ODMR)under excitation with an external RF-field. By sweeping the frequency ofthe excitation field, the field distribution may be mapped in twodimensions according to the local resonance condition given by the localfield magnitude as described in equation 1. For the illustrativehomogenous write field distribution of FIG. 13 and a matrix of NVcenters 112 as depicted in FIG. 12, the resonance condition of equation1 is fulfilled for a plurality of NV centers at the maximum write field202, as illustrated in FIG. 14A, and for NV centers on concentriccircles for lower field values 204 and 206 in the case of a fielddistribution with rotational symmetry, as illustrated in FIG. 14B andFIG. 14C, respectively. Thus, FIGS. 14A, 14B, and 14C illustrate NVcenters with the same resonance conditions when measuring ODMR in ahomogenous write field distribution.

The ODMR response of an individual NV center may be difficult to measureusing optical wide-field imaging due to the nano-meter spacing of NVcenters, which is beyond the optical diffraction limit of the objectivelens 122 a in FIG. 11. However the integrated PL intensity emitted fromthe array of NV centers may be collected for varying RF-excitationfrequencies. The integrated PL intensity may be written as follows.

$\begin{matrix}{{{SM}\left( f_{R\; F} \right)} = {\sum\limits_{y}\;{\sum\limits_{x}\;\left\lbrack {A\left( {f_{R\; F},x,y} \right)} \right\rbrack}}} & {{eq}.\mspace{14mu} 3}\end{matrix}$

Where SM is the integrated PL intensity, which is a function of theexcitation frequency f_(RF), and A(f,x,y) is the PL intensity for asingle NV center at position (x,y) in the NV center matrix at theexcitation frequency f_(RF).

FIG. 15, for example, illustrates an ESR spectrum with the amplitude ofthe integrated PL emitted from the matrix of NV centers shown in FIG. 12for the homogenous write field distribution of FIG. 13 with respect tovarious excitation frequencies. As illustrated in FIG. 15, the result isa frequency spectrum with discrete resonance lines that can beattributed to the NV centers that are subject to the same resonancecondition. For example, the peak 210 illustrated in FIG. 15 correspondsto the integrated PL intensity emitted from the NV centers shown in FIG.14A, which have the resonance condition of equation 1 fulfilled at themaximum write field 202 illustrated in FIG. 13. In other words, the peak210 in FIG. 15 is associated with the maximum write field 202. Thefrequency spectrum includes additional discrete resonance lines, e.g.,212 and 214, which may correspond to the NV centers illustrated FIGS.14B and 14C, by way of example.

Thus, for the idealized case of the write field illustrated in FIG. 13and for a given spacing and known single NV center PL-intensity, thewrite pole area, i.e. the area of the flat part of the fielddistribution that is related to the pole area, may be determined. Forexample, the integrated PL intensity for one spectral line may bedivided by the known single NV center PL-intensity to determine thenumber of contributing NV centers. As the spacing of the NV centers isknown, the area of the peak write field can be determined. Moreover, themagnitude of the peak write field may be deduced from the resonancefrequency of the highest order resonance line 210 shown in FIG. 15 usingequation 1.

FIG. 16 illustrates another write-field distribution, similar to thatshown in FIG. 13, but that is in-homogenous with radial symmetry, whichis more realistic than that illustrated in FIG. 13, as the peakwrite-field distribution in FIG. 16 varies linearly along the x-axis.FIG. 17 is an ESR spectrum illustrating the amplitude of the integratedPL emitted from the matrix of NV centers shown in FIG. 12 for thein-homogenous write field distribution of FIG. 16, with respect tovarious excitation frequencies. As can be seen, the spectrum of theintegrated PL intensity has a broadened resonance peak 220 at anexcitation frequency of approximately 205. FIG. 18 illustrates amagnified view of the resonance peak 220 from FIG. 17. As can be seen inFIG. 18, the broadened resonance peak 220 includes discrete resonancelines, which are related to discrete write field values, where thehighest frequency line 222 is related to the maximum field at the poleedge. The amplitude of each isolated resonance line in FIG. 18 isproportional to the number of contributing NV centers and may bedetermined, e.g., by a multi Lorentz-Function fit. By way of example,FIG. 19A illustrates NV centers 112 having positions that correspond tothe peak write field (223 in FIG. 16) and, thus, contribute to theresonance line 222 in FIG. 18. Similarly, FIG. 19B illustrates the NVcenters 112 with positions that correspond to the write field 225 inFIG. 16) and, thus, contribute to the resonance line 224 in FIG. 18, andFIG. 19C illustrates the NV centers 112 with positions that correspondto the write field 227 in FIG. 16 and, thus, contribute to the resonanceline 226 in FIG. 18. Thus, the discrete frequencies illustrated in thefrequency spectra shown in FIG. 18 may be mapped onto thetwo-dimensional spatial distribution of the write field based on theknown spacing of the NV centers. With the reasonable assumption that thehighest field value is at the edge of the write pole, i.e., at the writegap, the spatial field distribution may be reconstructed by scaling theline order number in the frequency spectrum with the known distancebetween NV centers, where counting starts at the highest frequency. Thespacing between the resonance lines reflects the field gradient, i.e.the larger the line separation the higher the field gradient. The sharpincrease of the field gradient (indicated by the increased separation ofresonance lines), for frequencies less than 200 in FIG. 18 coincideswith the edge of the write pole and, consequently, the geometry can beextracted. By way of example, a preset static, or a dynamic thresholdmay be applied to the number of resonance lines to identify resonancelines associated with the edge of the write pole. For example, asillustrated in FIG. 18, there are 11 discrete resonance lines between,and including, peaks 222 and 226. If the distance between NV centers isknown to be 20 nm, the spatial extent of the peak of the in-homogenouswrite field distribution (e.g., between 223 and 227 in FIG. 16) would be200 nm. The spatial extent of the peak of the write field corresponds tothe size of the write pole. Thus, the spatial distribution of the peakof the write field, and accordingly the diameter of the write pole, maybe determined based on the maximum excitation frequency, the number ofspectral lines associated with an edge of the write pole, and the knowndensity of the nitrogen vacancy centers which determines the spatialrelation of the spectral lines.

For a write field distribution with radial symmetry, as illustrated inFIGS. 13 and 16, the NV centers 112 contributing to ODMR at the sameexcitation field are on concentric circles with discrete radiidetermined by the discretization of the NV centers in the matrix. Thus,the write field profile may be reconstructed by mapping the number ofthe resonance line to the radius R considering the discrete grid pointsx, y of the NV center matrix and the write field B_(Z) as determinedfrom equation 1. As the radius R is determined based on discrete gridpoints of the NV center matrix and the number of the resonance line inthe frequency spectrum, the amplitude of the resonance line is notrelevant.

In general, however, the write field profile produced by recording headsis neither homogenous nor radially symmetric. FIG. 20, by way ofexample, illustrates a plan view of the a portion of an ABS of arecording head showing a write pole 232 with a wrap-around shield 234and a write gap 236 there between. FIG. 21A illustrates a write fieldprofile of a recording head of FIG. 20 in the down track direction,where a maximum write field is present at the write gap 236 and theleading edge of the write pole 232 has a smaller write field. FIG. 21Billustrates a write field profile of the recording head of FIG. 20 inthe cross track direction, where only half of the write fielddistribution is shown starting at the track center. FIG. 22 illustratesa matrix of evenly spaced NV centers 112 in a diamond film 110, similarto that shown in FIG. 12, but with the spatial extent of differentvalues of the write field from FIGS. 21A and 21B illustrated assemi-circles. It should be noted that for simplification thesemi-circles represent the field distributions from FIGS. 21A and 21B inan idealized form. FIGS. 23A, 23B, and 23C illustrate NV centers fromthe matrix of NV centers illustrated in FIG. 22 that contribute to theODMR measurement at different write field values, similar to that shownin FIGS. 14A, 14B, and 14C. FIG. 24 is an ESR frequency spectrumillustrating the amplitude of the integrated PL from the NV centers atvarious excitation frequencies. As discussed previously, the spectralline 250 at the highest excitation frequency represents the write fieldat the write gap 236. Characteristics of the recording head may bedetermined using the spectral lines, such as the surface area of thewrite pole based on the total number of contributing NVs determined fromlines 200 to 250, and a width near the write gap of the write head.Additionally, the magnetic write-width may be determined, e.g., from theamplitude of spectral line 250, which is proportional to the number ofcontributing NV centers. The magnitude of the write field at the writegap may be determined from the resonance frequency represented byspectral line 250 using equation 1. The number of spaces between thenumber of NV centers (#NV-1) may be multiplied by the known spacingbetween the NV centers to determine the magnetic write-width. It shouldbe noted that for simplification the semi-circles represent the fielddistribution shown in FIGS. 21A and 21B in an idealized form. The peakwrite-field may be determined based on the magnitude of the write fieldassociated with the excitation frequency at spectral line 250 based onequation 1. The shape and surface area could also be determined byfitting a magnetic model of the write-pole to the ODMR spectrum

A write foot-print measurement may be performed using a quasi-statictechnique that closely emulates the writing process. FIG. 25, forexample, schematically illustrates the measurement of ODMR from adiamond film 110 with a matrix of evenly distributed NV centers 112,similar to FIG. 22, with a magnetic recording medium 290 deposited onthe diamond film 110. The write foot-print of the recording head 112 maybe determined by applying a bias field 294 and writing a reversal domain292 on the recording medium 290 and the stray field is measured byevaluating the resonance spectrum of the integral PL intensity in thesame way as described for the write-field, discussed above. The writefoot-print may be measured for conventional recording heads as well asenergy assisted magnetic recording (HAMR, MAMR). Because the stray-fieldfrom the reversal domain is essentially homogeneous, the amplitude ofthe ESR and therefore the number of contributing NV centers translatesdirectly to the area of the reversal domain and consequently theeffective magnetic write-width.

Additionally, the effective magnetic write-width (MWW) may be determinedfrom the ODMR spectrum using NV centers without a requirement of astrict equidistance distribution of the NV centers in a matrix. Forexample, a known average density of the NV centers may be used todetermine the magnetic write width. FIG. 26, by way of example,illustrates a three-dimensional model of a write field distribution froma write head for perpendicular recording that is based on an assumedtwo-dimensional write field distribution that is an approximation of thewrite field distributions illustrated in FIGS. 21A and 21B. Asillustrated in FIG. 26, the effective magnetic write-width is defined atthe minimum write field (Bmin), which is the write field that issufficiently high to write on the recording medium, as determined by thecoercivity of the recording medium. FIG. 27 illustrates the write fieldcontours of the write field distribution from FIG. 26. The minimum writefield Bmin is identified in FIG. 27 as the dark contour line 302defining the shaded area, where the shaded area includes write fieldvalues greater than the minimum write field Bmin. The maximum writefield Bmax is at the right edge, e.g., the write gap, at the center ofthe pole.

FIG. 28 illustrates a measured ODMR spectrum, e.g., the ODMR signalbetween the minimum write field Bmin to the maximum write field Bmax,which is produced by write fields in the area enclosed by the blackcontour line 302 in FIG. 27. The ODMR spectrum may be integrated over arange Bmin to Bmax to generate an intensity value S_(int) as follows.

$\begin{matrix}{{S_{int}\left( {M\; W\; W} \right)} = {\left\lbrack {\sum\limits_{B = {B\;\min}}^{B\;\max}\;{{ODMR}\left( {B,{M\; W\; W}} \right)}} \right\rbrack^{C}.}} & {{eq}.\mspace{14mu} 4}\end{matrix}$

Where C is a constant that may be determined through calibration. Asillustrated in FIG. 29, the integrated spectral intensity S_(int) has alinear dependence on the magnetic write width, when a small exponentialconstant C is used. The constant C may remain the same if the minimumwrite field Bmin is varied, e.g., by changing the write current, anddepends on the density of the NV centers, where for an equidistantdistribution of NV centers, C=2/π. The density value assumes adistribution of distances with an average distance value that has somestandard deviation. Thus, to determine the effective magnetic writewidth, the ODMR spectrum may be measured and the integrated spectralintensity S_(int) calculated using equation 4, which is correlated tothe magnetic write width as illustrated in FIG. 29. Because the locationof the Bmin contour line and Bmax also depend on the write-current, themagnetic write width can be measured as a function of the bias level.

In addition to measuring characteristics such as physical dimensions ofthe write pole 116 and the strength of the magnetic field B, the NVcenters 112 in a diamond film may be used to measure the near-fieldpower at an aperture of a write head for Heat-Assisted MagneticRecording (HAMR). As illustrated in FIG. 2, the axial zero fieldsplitting parameter D(T) of an NV center is temperature dependent. Withincreasing temperature the energy gap between the m_(s)=0 and m_(s)=−1,+1 spin states is reduced and consequently the ESR frequency is shiftedto lower values. FIG. 30A, by way of example, illustrates thetemperature dependence of the ESR frequency with respect to temperatureand FIG. 30B illustrates resulting resonance lines at differenttemperatures, e.g., 300° K and 700° K. Thus, by employing ODMR, the NVcenter may be used to measure local temperatures on the recording headwith high spatial resolution, and thus, is suitable to characterize,e.g., near-field power at an aperture of a HAMR write head.

FIG. 31, by way of example, schematically illustrates the measurement ofODMR from a diamond film 110 with NV centers 112, similar to FIG. 9,with the diamond film 110 in contact with ABS of the recording head 114having a near field aperture 180, e.g., used with a HAMR write head. Inheat assisted magnetic recording (HAMR), the recording medium is locallyheated by a near-field emanating from a nano-aperture with, e.g. d=30 nmopening. Thus, the recording head that uses HAMR includes both a writepole and a thermal device, e.g., laser light source, that heats therecording medium through the near-field aperture 180. As discussed abovein reference to FIG. 1, the thermal device of the recording head 114,along with the write pole, may be controlled via the probe card 132 andthe biasing source 131. The biasing source 131 used to control thethermal device may be, e.g., pulsed or DC. If desired, separate probecards and/or biasing sources may be used to control the write pole andthermal device. For example, multiple probes from a single probe card132 may be connected to multiple biasing sources in order to separatelyengage either the write or the HAMR thermal device, or both, in situ,and either in sequential or simultaneous operation.

FIG. 32 illustrates the temperature profile produced by a near fieldaperture used in a HAMR write head. The NV centers 112 in the diamondfilm 110 may be used to measure the power of the near field at theaperture and/or the spatial extent of the aperture 180. The diamond film110 may be coated with a thin heat absorption layer 182, e.g., a fewnanometers thick, that has low thermal conductivity, e.g. SiO₂, thatfunctions as the recording medium to be heated. The diamond film 110 maybe held close to or in contact with the ABS of the recording head 114.Moreover, the diamond film 110 may be deposited on the ABS of therecording head 114. Further, if desired, the diamond film 110 may be onthe tip of an AFM arm as discussed above. The diamond film 110 may be,e.g., implanted with the NV centers 112 or may be a film that isembedded with nano-diamonds having NV centers. The diamond film 110 maybe a mono crystalline diamond film with a matrix of equally spaced NVcenters to measure the spatial extent of the near field aperture 180 andits power. The diamond film 110 may be a mono crystalline diamond filmwith a random distribution of NV centers 112 to measure the heatingpower with an estimate of the spatial extent of the near field aperture180. If the diamond film 110 is a film with suspended nano-diamondshaving a random distribution, the heating power of the near fieldaperture 180 may be measured.

As illustrated in FIG. 31, the recording head 114, including thenano-aperture 180, is brought into contact with or sufficiently near theheat absorption layer 182 on the diamond film 110 that the near-fieldemanating from the aperture 180 locally increases the temperature of theheat absorption layer 182. The increase in temperature ΔT affects theelectronic state of the NV centers 112 in the diamond film 110. Anexample of a temperature profile across the aperture is depicted in FIG.32.

As discussed above, a light source 102 (shown in FIG. 1) producesexcitation illumination 103 that is incident on the diamond film 110while in an external RF excitation field with varying excitationfrequencies or pulse sequence produced by the RF antenna 126. Inresponse to the excitation illumination 103 and while the near-field isproduced by aperture 180, the NV center produces spin dependent PL 113that is collected by the objective lens 122 and provided to the detector130 (shown in FIG. 1). If desired, depletion illumination 103 _(DEPL)may be scanned with respect to the recording head in two dimensions tomeasure ODMR. The integral PL emitted by the NVs is collected with ahigh numerical aperture objective lens 122 while applying an RF-field ofvarying frequency or a pulse sequence. A magnetic field may be producedby the write pole or an external magnetic field source, or no magneticfield may be used. Using a matrix of equally spaced NV centers, afrequency spectrum of the ODMR signal, such as that illustrated in FIG.33, may be generated and may be evaluated to extract temperatureinformation, as illustrated in FIG. 34 in the same way as described forthe write-field measurement, and using the known Temperature/ESRdependence, e.g., illustrated in FIGS. 30A and 30B.

Although the present invention is illustrated in connection withspecific embodiments for instructional purposes, the present inventionis not limited thereto. Various adaptations and modifications may bemade without departing from the scope of the invention. Therefore, thespirit and scope of the appended claims should not be limited to theforegoing description.

What is claimed is:
 1. A method comprising: providing a bias signal to arecording head that includes a write pole to produce a magnetic fieldfrom the recording head, wherein a crystal film with nitrogen vacancycenters is positioned in the magnetic field; providing an excitationfield to the crystal film; producing excitation illumination that isincident on the crystal film; measuring Optically Detected SpinResonance (ODMR) by detecting a decrease in a spin dependentphotoluminescence in response to the excitation illumination caused byelectron spin resonance (ESR) of the nitrogen vacancy centers at varyingexcitation frequencies of the excitation field; and determining acharacteristic of the recording head using the ODMR detected at the oneor more excitation frequencies of the excitation field.
 2. The method ofclaim 1, further comprising providing a plurality of bias signals withdifferent levels to the recording head.
 3. The method of claim 1,wherein the nitrogen vacancy centers have a known density and whereindetermining the characteristic of the recording head uses the knowndensity of the nitrogen vacancy centers.
 4. The method of claim 3,wherein the characteristic of the recording head comprises a spatialextent of the write pole.
 5. The method of claim 4, wherein the spatialextent of the write pole is determined based on a spatial extent of awrite field produced by the recording head.
 6. The method of claim 4,further comprising: determining a number of nitrogen vacancy centerscontributing to an ODMR signal measured at one or more excitationfrequencies based on a contrast of the ODMR signal at the one or moreexcitation frequencies and a known contrast of the ODMR signal for asingle nitrogen vacancy center; wherein the spatial extent of the writepole is determined based on the number of nitrogen vacancy centerscontributing to the ODMR signal emitting at the one or more excitationfrequencies and the known density of the nitrogen vacancy centers. 7.The method of claim 4, further comprising determining a width of thewrite pole near a write gap based on the spatial extent of the writepole.
 8. The method of claim 4, wherein measuring ODMR at varyingexcitation frequencies produces an ESR spectrum, the method furthercomprising: determining a maximum excitation frequency in the ESRspectrum at which an ODMR signal is produced by one or more nitrogenvacancy centers; determining a number of spectral lines in the ESRspectrum associated with an edge of the write pole; and using themaximum excitation frequency, the number of spectral lines, and theknown density of the nitrogen vacancy centers which determines thespatial relation of the spectral lines to determine the spatial extentof the write pole.
 9. The method of claim 3, wherein the characteristicof the recording head is the magnetic write width, the method furthercomprising: determining a maximum excitation frequency at which an ODMRsignal is produced by one or more nitrogen vacancy centers; determininga number of nitrogen vacancy centers contributing to the ODMR signal atthe maximum excitation frequency; and determining the magneticwrite-width of the write pole using the number of nitrogen vacancycenters contributing to the ODMR signal at the maximum excitationfrequency and the known density of the nitrogen vacancy centers.
 10. Themethod of claim 9, further comprising determining the magnetic writewidth as a function of bias level.
 11. The method of claim 3, whereinthe characteristic of the recording head is the magnetic write width,the method further comprising: determining an integrated spectralintensity using the ODMR from a minimum write field to a maximum writefield and an exponential constant based on the density of the nitrogenvacancy centers; and determining the magnetic write width based on theintegrated spectral intensity.
 12. The method of claim 11, furthercomprising determining the magnetic write width as a function of biaslevel.
 13. The method of claim 3, further comprising: determining amaximum excitation frequency at which an ODMR signal is produced by oneor more nitrogen vacancy centers; and using the maximum excitationfrequency to determine a maximum write field produced by the write pole.14. The method of claim 1, wherein adjacent nitrogen vacancy centers areseparated by a distance greater than a width of the write pole, furthercomprising producing relative movement between the recording head andthe crystal film thereby scanning a nitrogen vacancy center over therecording head in two dimensions.
 15. The method of claim 14, whereinthe nitrogen vacancy center is scanned over the write pole and whereinthe determined characteristic of the recording head is magnetic fieldvalues.
 16. The method of claim 14, wherein the nitrogen vacancy centeris scanned over the write pole and wherein the determined characteristicof the recording head is a surface area of the write pole.
 17. Themethod of claim 14, wherein the nitrogen vacancy center is scanned overa near-field aperture area of the recording head for thermally assistedrecording and wherein the determined characteristic of the recordinghead is temperature values of the near-field aperture area of therecording head.
 18. The method of claim 1, wherein adjacent nitrogenvacancy centers are separated by a distance less than a width of thewrite pole, further comprising: producing a depletion illumination thatis coincident on the crystal film with the excitation illumination;scanning the coincident excitation illumination and the depletionillumination in two dimensions over the crystal film over a portion ofthe recording head; wherein measuring ODMR uses the coincidentexcitation illumination and depletion illumination.
 19. The method ofclaim 18, wherein the depletion illumination is one of a groupconsisting essentially of: Stimulated Emission Depletion (STED)illumination and Ground State Depletion (GSD) illumination.
 20. Themethod of claim 18, wherein the excitation illumination and thedepletion illumination are scanned over the write pole and wherein thedetermined characteristic of the recording head is magnetic fieldvalues.
 21. The method of claim 18, wherein the excitation illuminationand the depletion illumination are scanned over the write pole andwherein the determined characteristic of the recording head is a surfacearea of the write pole.
 22. The method of claim 18, wherein theexcitation illumination and the depletion illumination are scanned overa near-field aperture area of the recording head for thermally assistedrecording and wherein the determined characteristic of the recordinghead is temperature values of the near-field aperture area of therecording head.
 23. The method of claim 18, wherein the crystal film isattached to an air bearing surface of the recording head.
 24. Anapparatus comprising: a biasing source configured to provide a biassignal; a probe card coupled to the biasing source and configured to beconnected to a recording head that includes a write pole to provide thebias signal to the recording head that causes the recording head toproduce a magnetic field; a light source that produces excitationillumination that is incident on a crystal film with nitrogen vacancycenters that is in the magnetic field produced by the recording head; aradio frequency antenna that provides an excitation field to the crystalfilm; a microscope configured to detect photoluminescence produced bythe nitrogen vacancies in response to the excitation illumination; and aprocessor coupled to the microscope and configured to measure OpticallyDetected Spin Resonance (ODMR) by detecting a decrease in a spindependent photoluminescence in response to the excitation illuminationcaused by electron spin resonance (ESR) of the nitrogen vacancy centersat varying excitation frequencies of the excitation field, and determinea characteristic of the recording head using the ODMR detected at theone or more excitation frequencies of the excitation field.
 25. Theapparatus of claim 24, wherein the biasing source is configured toprovide a plurality of bias signals with different levels, which theprobe card provides to the recording head.
 26. The apparatus of claim24, wherein the nitrogen vacancy centers have a known density andwherein the processor is configured to further use the known density ofthe nitrogen vacancy centers to determine the characteristic of therecording head.
 27. The apparatus of claim 26, wherein thecharacteristic of the recording head comprises a spatial extent of thewrite pole.
 28. The apparatus of claim 27, wherein the spatial extent ofthe write pole is determined based on a spatial extent of a write fieldproduced by the recording head.
 29. The apparatus of claim 27, whereinthe processor is configured to: determine a number of nitrogen vacancycenters contributing to an ODMR signal measured at one or moreexcitation frequencies based on a contrast of the ODMR signal at the oneor more excitation frequencies and a known contrast of the ODMR signalfor a single nitrogen vacancy center; wherein the spatial extent of thewrite pole is determined based on the number of nitrogen vacancy centerscontributing to the ODMR signal emitting at the one or more excitationfrequencies and the known density of the nitrogen vacancy centers. 30.The apparatus of claim 27, wherein the processor is further configuredto determine a width of the write pole near a write gap based on thespatial extent of the write field.
 31. The apparatus of claim 27,wherein the processor is configured to measure ODMR at varyingexcitation frequencies to produce an ESR spectrum, the processor isfurther configured to: determine a maximum excitation frequency in theESR spectrum at which an ODMR signal is produced by one or more nitrogenvacancy centers; determine a number of spectral lines in the ESRspectrum associated with an edge of the write pole; and use the maximumexcitation frequency, the number of spectral lines, and the knowndensity of the nitrogen vacancy centers which determines the spatialrelation of the spectral lines to determine the spatial extent of thewrite pole.
 32. The apparatus of claim 26, wherein the characteristic ofthe recording head is the magnetic write width, and wherein theprocessor is further configured to: determine a maximum excitationfrequency at which an ODMR signal is produced by one or more nitrogenvacancy centers; determine a number of nitrogen vacancy centerscontributing to the ODMR signal at the maximum excitation frequency; anddetermine the magnetic write-width of the write pole using the number ofnitrogen vacancy centers contributing to the ODMR signal at the maximumexcitation frequency and the known density of the nitrogen vacancycenters.
 33. The apparatus of claim 32, wherein the magnetic write widthis determined as a function of bias level.
 34. The apparatus of claim26, wherein the characteristic of the recording head is the magneticwrite width, and wherein the processor is configured to: determine anintegrated spectral intensity using the ODMR from a minimum write fieldto a maximum write field and an exponential constant based on thedensity of the nitrogen vacancy centers; and determine the magneticwrite width based on the integrated spectral intensity.
 35. Theapparatus of claim 34, wherein the magnetic write width is determined asa function of bias level.
 36. The apparatus of claim 26, wherein theprocessor is further configured to: determine a maximum excitationfrequency at which an ODMR signal is produced by one or more nitrogenvacancy centers; and use the maximum excitation frequency to determine amaximum write field produced by the write pole.
 37. The apparatus ofclaim 24, wherein adjacent nitrogen vacancy centers are separated by adistance greater than a width of the write pole, the apparatuscomprising at least one actuator to produce relative movement betweenthe recording head and the crystal film thereby scanning a nitrogenvacancy center over the recording head in two dimensions.
 38. Theapparatus of claim 37, wherein the nitrogen vacancy center is scannedover the write pole and wherein the determined characteristic of therecording head is magnetic field values.
 39. The apparatus of claim 37,wherein the nitrogen vacancy center is scanned over the write pole andwherein the determined characteristic of the recording head is a surfacearea of the write pole.
 40. The apparatus of claim 37, wherein thenitrogen vacancy center is scanned over a near-field aperture area ofthe recording head for thermally assisted recording and wherein thedetermined characteristic of the recording head is temperature values ofthe near-field aperture area of the recording head.
 41. The apparatus ofclaim 24, wherein adjacent nitrogen vacancy centers are separated by adistance less than a width of the write pole, the apparatus furthercomprising: a second light source that produces depletion illuminationthat is coincident on the crystal film with the excitation illumination;at least one mirror to scan the coincident excitation illumination andthe depletion illumination in two dimensions over the crystal film overa portion of the recording head; wherein the processor is configured touse the coincident excitation illumination and depletion illumination tomeasure the ODMR.
 42. The apparatus of claim 41, wherein the depletionillumination is one of a group consisting essentially of: StimulatedEmission Depletion (STED) illumination and Ground State Depletion (GSD)illumination.
 43. The apparatus of claim 41, wherein the excitationillumination and the depletion illumination are scanned over the writepole and wherein the determined characteristic of the recording head ismagnetic field values.
 44. The apparatus of claim 41, wherein theexcitation illumination and the depletion illumination are scanned overthe write pole and wherein the determined characteristic of therecording head is a surface area of the write pole.
 45. The apparatus ofclaim 41, wherein the excitation illumination and the depletionillumination are scanned over a near-field aperture area of therecording head for thermally assisted recording and wherein thedetermined characteristic of the recording head is temperature values ofthe near-field aperture area of the recording head.
 46. The apparatus ofclaim 41, wherein the crystal film is attached to an air bearing surfaceof the recording head.
 47. A method comprising: providing a bias signalto a recording head that includes a thermal device and a near-fieldaperture and includes a write pole to produce a magnetic field from therecording head, wherein a crystal film with nitrogen vacancy centershaving a known density is positioned in the magnetic field; providing abias signal to the thermal device to heat the crystal film using thenear-field aperture; providing an excitation field to the crystal film;producing excitation illumination that is incident on the crystal film;measuring Optically Detected Spin Resonance (ODMR) by detecting adecrease in a spin dependent photoluminescence in response to theexcitation illumination caused by electron spin resonance (ESR) of thenitrogen vacancy centers at varying excitation frequencies of theexcitation field; and determining a temperature characteristic of thenear-field aperture of the recording head using the ODMR and the knowndensity of the nitrogen vacancy centers.
 48. An apparatus comprising: abiasing source configured to provide bias signals; a probe card coupledto the biasing source and configured to be connected to a recording headthat includes a thermal device and a near-field aperture and includes awrite pole, the probe card provides a bias signal to the recording headthat causes the recording head to produce a magnetic field and a secondbias signal to the thermal device to heat a crystal film using thenear-field aperture, the crystal film includes nitrogen vacancy centershaving a known density and is in the magnetic field produced by therecording head; a light source that produces excitation illuminationthat is incident on the crystal film; a radio frequency antenna thatprovides an excitation field to the crystal film; a microscopeconfigured to detect photoluminescence produced by the nitrogenvacancies in response to the excitation illumination; and a processorcoupled to the microscope and configured to measure Optically DetectedSpin Resonance (ODMR) by detecting a decrease in a spin dependentphotoluminescence in response to the excitation illumination caused byelectron spin resonance (ESR) of the nitrogen vacancy centers at varyingexcitation frequencies of the excitation field; and determine atemperature characteristic of the near-field aperture of the recordinghead using the ODMR and the known density of the nitrogen vacancycenters.
 49. A method comprising: providing a bias signal to a recordinghead that includes a write pole to produce a magnetic field from therecording head; scanning a probe having a probe tip comprising a crystalparticle with at least one nitrogen vacancy center through the magneticfield produced by the recording head; providing an excitation field tothe crystal particle; producing excitation illumination that is incidenton the crystal particle; measuring Optically Detected Spin Resonance(ODMR) by detecting a decrease in a spin dependent photoluminescence inresponse to the excitation illumination caused by electron spinresonance (ESR) of the at least one nitrogen vacancy center at varyingexcitation frequencies of the excitation field; and determining acharacteristic of the recording head using the ODMR measured at the oneor more excitation frequencies of the excitation field.
 50. The methodof claim 49, wherein the probe is scanned over a write pole of therecording head and wherein the determined characteristic of therecording head is magnetic field values.
 51. The method of claim 49,wherein the probe is scanned over a write pole of the recording head andwherein the determined characteristic of the recording head is a surfacearea of the write pole.
 52. The method of claim 49, wherein the probe isscanned over a near-field aperture area of the recording head forthermally assisted recording and wherein the determined characteristicof the recording head is temperature values of the near-field aperturearea of the recording head.
 53. An apparatus comprising: a biasingsource configured to provide a bias signal; a probe card coupled to thebiasing source and configured to be connected to a recording head thatincludes a write pole to provide the bias signal to the recording headthat causes the recording head to produce a magnetic field; a probehaving a probe tip comprising a crystal particle with at least onenitrogen vacancy center, the probe configured to be scanned through themagnetic field produced by the recording head; a light source thatproduces excitation illumination that is incident on the crystalparticle; a radio frequency antenna that provides an excitation field tothe crystal particle; a microscope configured to detectphotoluminescence produced by the at least one nitrogen vacancy in thecrystal particle; a processor coupled to the microscope and configuredto measure Optically Detected Spin Resonance (ODMR) by detecting adecrease in a spin dependent photoluminescence in response to theexcitation illumination caused by electron spin resonance (ESR) of theat least one nitrogen vacancy center at varying excitation frequenciesof the excitation field; and determine a characteristic of the recordinghead using the ODMR measured at the one or more excitation frequenciesof the excitation field.
 54. The apparatus of claim 53, wherein theprobe is scanned over a write pole of the recording head and wherein thedetermined characteristic of the recording head is magnetic fieldvalues.
 55. The apparatus of claim 53, wherein the probe is scanned overa write pole of the recording head and wherein the determinedcharacteristic of the recording head is a surface area of the writepole.
 56. The apparatus of claim 53, wherein the probe is scanned over anear-field aperture area of the recording head for thermally assistedrecording and wherein the determined characteristic of the recordinghead is temperature values of the near-field aperture area of therecording head.